2026-03-08 00:00:00:0本报记者 刘博通 赵晓光委员——
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Minimum metal 1 feature size is around 660 nm with a 1225 nm pitch, metal 3 has larger 940 nm features with around 1400 nm pitch (however, overglass likely makes the wires on M3 appear fatter than the actual metal features are). M3-M2 vias do not have any visible sagging in the metal trace, but can be easily identified visually by a roughly 2000 nm circular capture pad on the conductor. Standard cell rows are about 9.9 μm tall, consistent with a technology node around 250 nm.